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将Sol-Gel法制备的掺钙钛酸镧铅纳米粉粒(PCLT)与聚偏氟乙烯-三氟乙烯(P(VDF-TrFE)均匀复合,作为热释电传感器的敏感膜,比同样制备条件的纯聚偏氟乙烯-三氟乙烯膜的探测优值高约22.4%。并以沉积有35nmITO薄膜的廉价PET塑料为衬底,用旋转涂膜法沉积PCLT/P(VDF-TrFE)复合敏感膜,用Ni-Cr薄膜作上电极,制备了PCLT/P(VDF-TrFE)/PET热释电传感器。PET塑料可有效降低热释电元件的热导,下电极ITO可反射红外辐射,明显提高了传感器的电压响应和降低热释电元件的热噪声。测试结果表明,PCLT/P(VDF-TrFE)/PET热释电传感器的探测率达到3.4×107cmHz1/2W-1,比同样制备条件的体硅衬底传感器高2个数量级以上。
The lanthanum-doped lead lanthanum lead nanoparticle (PCLT) prepared by Sol-Gel method and polyvinylidene fluoride-trifluoroethylene (P (VDF-TrFE)) were uniformly mixed and used as the sensitive membrane of pyroelectric sensor, (PVDF-Trifluoroethylene) membrane was found to be about 22.4% better than that of the conventional PETLT / P (VDF-TrFE) composite with a low-cost PET plastic deposited with a 35nm ITO film Sensitive film, a PCLT / P (VDF-TrFE) / PET pyroelectric sensor was fabricated using Ni-Cr film as the upper electrode.The PET plastic can effectively reduce the thermal conductivity of the pyroelectric element, the lower electrode ITO can reflect infrared radiation, The results show that the detection rate of PCLT / P (VDF-TrFE) / PET pyrroelectric sensor reaches 3.4 × 107cmHz1 / 2W-1, which is lower than that of the same preparation Condition of the bulk silicon substrate sensor more than 2 orders of magnitude higher.