基于适度光反馈自混合干涉(OFSMI)技术,设计了一种位移测量方法。该方法通过对自混合干涉信号的整数条纹部分进行计数和对小数条纹部分进行细分,实现大量程高分辨率的位移测量。对小数条纹分析时,运用数据拟合方法,找出干涉波形特征点与被测物位移之间的关系,从而实现对小数干涉条纹部分对应位移的测量。仿真分析和实验结果证明,此方法可对位移进行大量程高精度的测量,误差平均为0.83%。并通过设计算法对物体的任意运动轨迹进行重构。 Based on the OFSMI technique, a displacement measurement method is designed. This method achieves long-range and high-resolution displacement measurement by counting integer stripe parts of self-mixing interference signals and subdividing fractional stripe parts. When analyzing the fractional stripes, the data fitting method is used to find out the relationship between the characteristic points of the interference waveform and the displacements of the measured object, so as to measure the corresponding displacement of the fractional interference fringes. Simulation and experimental results show that this method can measure displacement with a large range and high precision with an average error of 0.83%. And through the design algorithm to reconstruct the arbitrary trajectory of the object.