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这里,我们描述一组实验、在位测量和理论模型,用来评估集成多晶硅微机械的摩擦系数及其磨损.实验中使用了一个基于激光束的测量系统,监控微机械的旋转运动,记录速度高达1万每秒转的转速,最后在不同的操作条件下决定受测结构的生命周期,某些特殊的元件在运转百万次后仍能正常工作.
Here, we describe a set of experiments, in-position measurements and theoretical models that are used to evaluate the friction coefficient and wear of integrated polysilicon micromechanics using a laser-based measurement system that monitors the rotational movement of the micromechanical machine, recording speed Up to 1 million revs per second, the final under different operating conditions determine the life cycle of the structure under test, some special components in millions of operations can still work properly.