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微细电化学线切割加工是最近出现的一种微细加工新方法。本文基于电化学腐蚀原理,制备微细电化学线切割加工中使用的微米尺度线电极。建立了腐蚀过程理论模型,通过测量线电极的电阻变化来实时监测线电极腐蚀过程中的直径大小,并基于虚拟仪器技术建立了线电极制备监控系统。通过试验对钨线电极的腐蚀过程进行分析,得出监控系统的直径计算值与实际值误差低于10%。最后,利用此方法制备出直径5μm的钨线电极。
Fine electrochemical wire cutting is a new method of microfabrication that has recently emerged. In this paper, based on electrochemical corrosion principle, the preparation of micro-electrochemical wire cutting used in the micron-scale wire electrode. A theoretical model of corrosion process was established. The diameter of wire during corrosion process was measured in real time by measuring the resistance change of wire electrode. The monitoring system of wire electrode preparation was established based on virtual instrument technology. Through the analysis of the corrosion process of the tungsten wire electrode, the error between the calculated value and the actual value of the monitoring system is less than 10%. Finally, using this method to prepare a tungsten wire electrode diameter of 5μm.