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微结构是微机电系统的基本元件,其几何尺寸、运动特性、材料及力学特性直接影响微机电系统的整体性能。提出一种将计算机微视觉、米劳显微干涉、频闪成像和激光多普勒测振等技术充分融合的微结构静态和动态特性的光学测试平台,分别对微谐振器的平面和离面周期运动特性和微机械扭转镜的离面瞬时运动特性进行测试研究。实验结果表明,利用计算机微视觉和频闪成像技术能够实现微结构的平面位移、运动相位及谐振频率等周期运动参量的测试,位移的重复精度为30nm;利用显微干涉和频闪成像技术可实现微结构的离面位移及表面扭曲等周期运动参量的测试,位移的重复精度为3nm;激光多普勒测振技术具有在频域上对微结构瞬态运动进行分析的优点,是时域上周期运动测试的重要补充。
Micro-structure is the basic component of micro-electromechanical system, its geometry, movement, material and mechanical properties directly affect the overall performance of MEMS. This paper presents an optical test platform for microstructural static and dynamic characteristics that fully integrates computer micro-vision, Millau micro-interference, stroboscopic imaging and laser Doppler vibration measurement. Periodic motion characteristics and micromechanical torsion mirror out of plane instantaneous motion characteristics of the test study. The experimental results show that the use of computer micro-vision and strobe imaging technology can achieve the microstructure of the plane displacement, phase and resonance frequency of the periodic motion parameters such as the test, the displacement of the repeat accuracy of 30nm; the use of microscopic interference and stroboscopic imaging technology To achieve the test of periodic motion parameters such as out-of-plane displacement and surface distortion of microstructures, the repeatability of displacement is 3nm. Laser Doppler vibration measurement has the advantage of analyzing the transient motion of microstructures in the frequency domain. An important supplement to last-cycle exercise testing.