低效取样光栅是激光取样技术的一种重要元件 ,它可以看成离轴的二相位的菲涅耳波带板。基于菲涅耳波带板的形成原理 ,对取样光栅的变周期环带结构进行了理论分析 ,推导出取样光栅的透过率函数。并在此基础上 ,采用电子束直写加工光栅掩模 ,制作取样光栅。该方法与一般的光学全息方法相比 ,具有设计灵活、重复性好、适于大批量生产等优点。 Inefficient sampling grating is an important component of laser sampling technology, which can be seen as a two-phase Fresnel zone plate off-axis. Based on the formation principle of Fresnel zone plates, the structure of the variable-period zone of the sampled grating is theoretically analyzed and the transmittance function of the sampled grating is deduced. And on this basis, using electron beam direct writing processing grating mask, making sampling grating. Compared with the general optical holography method, this method has the advantages of flexible design, good repeatability and suitable for mass production.