在绝缘层上的硅材料上制作了四种具有不同输入输出结构的星形耦合器并进行了测试 ,对脊形波导与平板波导相互过渡时过渡区的损耗问题进行了研究和讨论 ,计算得到在所使用的材料参量下利用锥形结构可以得到1dB左右的最小损耗 ,这一损耗是由于脊型波导与平板波导间的模式失配造成的。以文献中的实验数据为出发点 ,分析了脊形波导的偏振问题 ,并通过对脊型波导器件层厚度、脊高、脊宽进行优化设计 ,得到了不同偏振模式的有效折射率差仅为 10 -5量级的单模脊型波导结构 ,这样的偏振效应在器件设计中可以忽略。 Four kinds of star coupler with different input and output structures were fabricated on the silicon material on the insulation layer and tested. The loss of the transition region in the transition between the ridge waveguide and the slab waveguide was studied and discussed, and the calculated Conical structures are used in the material parameters used to achieve a minimum loss of about 1 dB due to the pattern mismatch between the ridge and slab waveguides. Taking the experimental data in the literature as the starting point, the polarization problem of the ridge waveguide is analyzed. The optimized design of the ridge waveguide device layer thickness, ridge height and ridge width results in that the effective refractive index difference of different polarization modes is only 10 -5 order single-mode ridge waveguide structure, such a polarization effect in the device design can be ignored.