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差压式真空度测量是低真空范围 (0 .1～ 10 0 k Pa或 1～ 76 0乇 )的一种常用测量方法。本文讨论了差压式真空度测量的局限性以及由于大气压强的变化而产生的测量系统误差 ,并给出了误差的修正方法 (公式 )。另外 ,还讨论了如何正确使用差压式真空度测量仪表和规范真空度计量单位的有关问题。
Differential pressure vacuum measurements are a common measurement method in the low vacuum range (0.1-120 kPa or 1 to 76 0 torr). This article discusses the limitations of differential pressure vacuum measurements and measurement system errors due to changes in atmospheric pressure, and gives a method (formula) for error correction. In addition, it also discussed how to correctly use the differential pressure vacuum gauge and standard vacuum units of measurement related issues.