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最近国外正在发展一种微型集成仪器技术.这种技术是以大规模集成电路制造技术为基础的.采用特殊的化学腐蚀剂,可以在硅片上蚀刻出各种三维立体图形.在这个领域中走在前列的是美国斯坦福大学的一个研究组,他们已经取得的成果是把气相色谱仪的大部分部件集成到一块直径五厘米的硅片上.总装以后,整个仪器的大小仅为一般色谱仪的二十分之一,而且非常结实灵便;可以把它安在探测火箭上研究空间的气体,也可以用来监测空气中的有害气体,加强环境保护工作.斯坦福的科学家们希望他们的微型色谱仪将来可以装在外衣的翻领上.在目前的气相色谱仪中,由细长的金属管道系统组成的色谱柱占据了仪器的很大空间.色谱仪的微型化要求把这些错综复杂的管道系统压缩到一个硅片上.为此目的,斯坦福大学的研究组决定把色谱柱的
Recently, a miniature integrated instrumentation technology is being developed abroad, based on LSI manufacturing technology, which uses special chemical etchants to etch a variety of three-dimensional (3D) patterns on silicon wafers. At the forefront is a research group at Stanford University in the United States who have achieved the result of integrating most of the components of a gas chromatograph on a piece of silicon with a diameter of five centimeters. After assembly, the size of the entire instrument is only that of a typical chromatograph One-twentieth, and very strong and agile; it can be placed in the research space on the detection rocket gas, it can also be used to monitor the harmful gases in the air, strengthen environmental protection work.Stanford scientists hope that their micro-chromatograph In the future, gas chromatographs, consisting of slender metal piping systems, take up a lot of space in the instrument. The miniaturization of chromatographs requires that these intricate plumbing systems be compressed to On a silicon wafer, for this purpose, Stanford’s group decided to put the column