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随着对结构化超精密部件需要的不断增加,出现了加工具有高的表面光洁度以及形状精度的非旋转对称镜片的新技术。根据现有的快速刀具伺服系统,研制出了最大行程为16mm的新型快速刀具伺服系统(图1)。以前的快速刀具伺服系统采用了弹性导向机构,而现在的快速刀具伺服系统则采用了空气轴承,并且用了一个高频直线电机来驱动这个系统。由于采用了一个新的功率放大器,使得这个系统能够最高达到100Hz的频率以及1mm的振动幅度。这篇文章给出了这种新型快速刀具伺服系统的技术细节。
As the need for structured ultra-precision components continues to grow, new technologies have emerged that process non-rotationally symmetric lenses with high surface finish and shape accuracy. According to the existing rapid tool servo system, a new fast tool servo system with a maximum stroke of 16 mm has been developed (Figure 1). Previous fast tool servo systems used a flexible guide mechanism, whereas today’s fast tool servo systems employ air bearings and use a high-frequency linear motor to drive the system. Due to the adoption of a new power amplifier, this system enables up to 100Hz frequency and 1mm vibration amplitude. This article gives the technical details of this new fast tooling servo system.