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本文介绍以单板微型计算机-MEK6 800D2为基础,经扩充后组成的一个具有双监控程序的微型计算机系统IBEC以及该系统在对离子束刻蚀机进行过程自动控制中的应用。文中着重论述了系统总体设计和系统软件的设计思想及其监控命令的功能。
This article introduces a microcomputer system IBEC with dual monitoring program based on veneer microcomputer-MEK6 800D2, and the application of the system in the automatic control of the ion beam etching machine. This article focuses on the design of the system overall design and system software and the functions of monitoring commands.