【摘 要】
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This article proposes a novel “cathode-on-membrane” vacuum microelectronic (VME) pressure sensor. Compared with conventional VME pressure sensors, the packag
【出 处】
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Journal of Electronics(China)
论文部分内容阅读
This article proposes a novel “cathode-on-membrane” vacuum microelectronic (VME) pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to control, and therefore it enable greater potential of mass production and high productivity. The properties of the new sensor have been theoretically investigated by computer simulations; the practical structure has been designed and fabricated; and the package technique has been studied.
This article proposes a novel “cathode-on-membrane ” vacuum microelectronic (VME) pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to control, and therefore it enable greater potential of mass production and high productivity. The properties of the new sensor have been theoretically investigated by computer simulations; the practical structure has been designed and fabricated; and the package technique has been studied.
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