氧化硅薄膜电容器是目前国內在薄膜混合集成电路中广泛被采用的一种电容器。它的优点是SiO蒸气压较高,可以利用电阻加热型蒸发源进行真空蒸发而获得介质膜,适应当前国内大多数工厂的生产设备情况,但在生产和使用过程中又暴露了该电容器存在着一些问题,如可靠性差,损耗值较大等。为了进一步提高氧化硅薄膜电容器的质量,各兄弟单位作了大量工作,积累了宝贵经验。本文系我院工农兵学员毕业实践的小结,是我们向兄弟单位学习 Silicon oxide film capacitors are currently widely used in thin film hybrid integrated circuits in a capacitor. It has the advantage of SiO vapor pressure is higher, you can use the resistance heating evaporation source to obtain a dielectric film vacuum evaporation, to adapt to the current situation of most domestic factories production equipment, but in the production and use of the process has exposed the existence of the capacitor Some problems, such as poor reliability, larger loss values. In order to further improve the quality of silicon oxide film capacitors, the brothers made a lot of work unit, has accumulated valuable experience. This article is a summary of our college graduates’ practice of workers, peasants and soldiers is that we learn from the brothers unit