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报道了掠入射软X光平面镜反射率标定实验。实验利用北京同步辐射装置 (BSRF) 3W 1B束线及反射率计靶室 ,在束流 35mA～ 110mA、贮存环电子能量 2GeV专用光运行模式下 ,在 5 0eV～ 85 0eV能区分四个能段 ,进行了 5°掠入射Ni平面镜反射率标定实验。标定过程中用高灵敏度无死层的硅光二极管代替X射线二极管作探测器 ,输出信号提高 2～ 3个量级 ,可标定能区从 15 0eV～ 2 70eV拓展到 5 0eV～ 85 0eV ,给出了完整的 5°Ni平面镜反射率标定曲线。最后把实验数据与理论计算作了比对并进行了分析。
The grazing incidence soft X-ray plane mirror reflectivity calibration experiment is reported. Experiments using Beijing Synchrotron Radiation Facility (BSRF) 3W 1B beamline and reflectometer target chamber, in the beam 35mA ~ 110mA, storage ring electronic energy 2GeV special light operation mode, in the 500eV ~ 85eeV can distinguish four energy segments , 5 ° grazing incidence Ni plane mirror reflectivity calibration experiment. Calibration process with high sensitivity without dead silicon photodiode instead of X-ray diode detector, the output signal increased by 2 to 3 orders of magnitude, the calibration energy range from 15 0eV ~ 2 70eV extended to 5 0eV ~ 85 0eV, to A complete 5 ° Ni flat mirror reflectivity calibration curve. Finally, the experimental data and theoretical calculations were compared and analyzed.