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针对基于无孔Al_2O_3绝缘层的金属-绝缘层-金属(MIM)电子源存在显著负阻效应和无法在气氛下稳定发射电子的特点,提出并制备了一种Al底电极-多孔Al_2O_3绝缘层-Ti/Au复合顶电极结构的MIM电子源。在真空,不同压强的氮气和空气中的电子发射结果表明,Al_2O_3绝缘层经过磷酸扩孔后,MIM电子源的负阻效应在电子发射区间几乎消失,同时增强了电子发射的局部电场,电子获得更好的加速,提高了发射电流。Ti/Au复合顶电极改善了Au膜和多孔Al_2O_3绝缘层的电接触,减小了电子能量的散射。该电子源发射的电子能够激发氮气,在空气和氮气中的发射电流大小受气体及其压强的影响。
In view of the significant negative resistance effect of the metal-insulator-metal (MIM) electron source based on the non-porous Al 2 O 3 insulating layer and the stably emitting of electrons in the atmosphere, an Al bottom electrode-porous Al 2 O 3 insulating layer- MIM Electron Source for Ti / Au Composite Top Electrode Structure. The results of electron emission in vacuum and different pressures of nitrogen and air show that the negative resistance effect of the MIM electron source almost disappears in the electron-emitting region and enhances the local electric field of electron emission after the hole is broadened by phosphoric acid. Better acceleration, increased emission current. The Ti / Au composite top electrode improves the electrical contact between the Au film and the porous Al 2 O 3 insulating layer and reduces the scattering of electron energy. The electron emitted by the electron source can excite nitrogen, and the emission current in air and nitrogen is affected by the gas and its pressure.