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本文阐述了准分子激光器的工作原理及特性，综述了准分子激光器在材料加工中的应用，并与ＣＯ２激光器、Ｎｄ：ＹＡＧ激光器进行了比较和分析。
This paper describes the working principle and characteristics of excimer lasers, reviews the application of excimer lasers in material processing, and compares them with CO2 lasers and Nd: YAG lasers.