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本文设计了用于超精密加工技术的具有亚毫微米分辩率的超精密光电位移传感器。这种传感器的设计原理是:当被测表面有一微小位移时,其表面的反射光在某一特定点的光强变化具有很高的灵敏性。该传感器由单一光源、被测物及参考表面、用于反射光传输的光纤束和光电二极管等构成。实际测量时,通过光纤束传输的单一光源的光照射枝测物表面和参考表面,两表面的反射光又通过光纤束传输到两个独立但等同的光电二极管上,通过差动放大器,光电二极管给出包括反射光全部信号在内的高灵敏度位移信号。这种传感器在性能上具有某些显著的特点,如:非接触测量、0.5nm的高分辩率、线性误差在5％以内的约30μm宽的工作范围,以及可以充分满足一定研究目的的每20秒仅漂移1nm的稳定性。
This paper designs an ultra-precision photoelectric displacement sensor with sub-nanometer resolution for ultra-precision machining. The design principle of this sensor is: When the measured surface has a small displacement, the surface of the reflected light intensity at a particular point of change has a high sensitivity. The sensor consists of a single light source, the measured object and the reference surface, the optical fiber bundle for the reflected light transmission and the photodiode. In actual measurement, the light from a single light source transmitted through the fiber bundle illuminates the branch and reference surfaces, and the reflected light from both surfaces is transmitted through the bundle to two separate but identical photodiodes. The differential amplifier, photodiode A highly sensitive displacement signal is given, including all the reflected light signals. Such sensors have some notable performance characteristics, such as non-contact measurement, high resolution of 0.5nm, a working range of about 30μm with a linearity error of less than 5%, and every 20 Sec drift only 1nm stability.