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离子束刻蚀是70年代迅速发展起来的一种超精细加工新技术,它是利用离子束轰击固体表面的溅射现象,刻蚀固体表面,利用掩模,可加工出各种精细图形。在缺乏深度终点控制器的情况下,离子束流的稳定度关系到加工深度的精确控制,是离子束刻蚀机的重要指标。影响束流稳定的因素很多,如工作气体流量,阳极电压,真空室温度变化,阴极灯丝的蒸发,离子源栅极引出系统热变形等。因而提高束流稳定度是个重要而困难的问题。我们利用离子束刻蚀工艺制作沟槽栅声表面波器件,为了满足器件对沟槽深度分布的精度要求,需要提高束流稳定度,为此我们采用了束流回路控制方法。这方法是利用束流采样控制
Ion beam etching is a kind of ultrafine processing technology developed rapidly in the 1970s. It uses the ion beam to bombard the solid surface to sputter the solid surface and use the mask to process all kinds of fine patterns. In the absence of a deep endpoint controller, the stability of the ion beam stream is related to the precise control of the machining depth and is an important indicator of the ion beam etching machine. Many factors affect the stability of the beam, such as the working gas flow, the anode voltage, the vacuum chamber temperature changes, the cathode filament evaporation, the ion source grid leads to the system thermal deformation. Therefore, improving the stability of the beam is an important and difficult issue. We use the ion beam etching process to make trench grating surface acoustic wave devices, in order to meet the requirements of the depth of the device to the depth distribution of the groove, we need to improve the stability of the beam, for which we use the beam loop control method. This method is to use beam sampling control