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一、引言本文介绍的精密采样电阻器,是为电子束曝光机镜筒光路系统透镜电源研制的,透镜电源稳定度的高低,对电子束光路系统束点的稳定性和再现性,同样起着重要的作用;而透镜电源本身的稳定度要求在10~(-5)以上,精密采样电阻器的精度就要求达到100~(-5)数量级,当然这样高精度的采样电阻器亦可用于其它高稳定度电源。通过本采样电阻的工作电流一般在0.5～1A之间,并可适当调整,电阻器要求长时间的连续使用,而且本身的稳定度不大于3×10~(-6)v的数量级,要做到这些是有很大的困难的。对于透镜电源精密采样电阻器的处理方法是很多的,如有的用变压器油散热,油箱恒温;有的电阻基体采用螺旋管式中间通自来水冷却散热,然后再浸入油箱里恒温处理;还有的采用风冷等,这些所采取的各式各样的媒质散热的控温方法,都有着共同的弱点:结构复杂,使用不方便,从已达到的效果来看,是不很理想。
I. INTRODUCTION The precision sampling resistor introduced in this paper is developed for the lens power supply of the lens barrel optical system of electron beam lithography. The stability of the lens power supply is stable and reproducible with respect to the beam spot of the electron beam optical system. The accuracy of the precision sampling resistor is required to reach the order of 100 ~ (-5), of course, such a high-precision sampling resistor can also be used for other High stability power supply. The current through the sampling resistor is generally between 0.5 ~ 1A, and can be adjusted, the resistor requires continuous use for a long time, and its stability is not greater than the order of 3 × 10 ~ (-6) v, to be done It is a great deal to get here. There are many ways to deal with the lens power sampling resistor precision, such as the use of transformer oil cooling tank constant temperature; some resistance matrix spiral tube through the water through the cooling water cooling, and then immersed in the tank thermostat; and Using air-cooled, etc., all of these have adopted a variety of media cooling temperature control methods, have a common weakness: the structure is complex, inconvenient to use, from the effect has been achieved, is not very satisfactory.