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本文研究室温下工作 ,具有双敏感膜 ,检测ppb范围内O3 浓度的复合悬浮栅FET(HybridSuspendedGateFieldEffectTransistor即HSGFET)型臭氧传感器 .文中给出了四种固态HSGFET型臭氧传感器的实验结果 ,发现具有 [KI/A/LaF3]结构的传感器对O3有很好的响应特性 ;实验结果与由开尔芬 (Kelvin)探针得到的结果进行了比较 .
In this paper, we study the hybrid sensor with double sensitive membrane and detect the concentration of O3 in the ppb range by using HSGFET ozone sensor.This paper gives the experimental results of four kinds of solid state HSGFET ozone sensors, and found that with [KI / A / LaF3] sensor has a good response to O3; the experimental results are compared with the results obtained with Kelvin probe.