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本文报道了以Ｆｅ（ＣＯ）５和ＳｎＣｌ４为源，采用ＰＥＣＶＤ技术淀积Ｆｅ２Ｏ３－ＳｎＯ２双层薄膜，将该薄膜淀积在陶瓷管上，对氨气的敏感特性进行了测量，并讨论了敏感机理．
In this paper, a Fe2O3-SnO2 bilayer film was deposited by PECVD using Fe (CO) 5 and SnCl4 as the source. The thin film was deposited on a ceramic tube to measure the sensitivity of ammonia gas and discussed the sensitivity mechanism.