【摘 要】
：
We develop a miniaturized chamber installed on a tandetron accelerator into which negative ions of small carbon clusters are transported.Negative clusters C-1-C
【机 构】
：
Accelerator Laboratory, School of Physics and Technology and Key Laboratory of Artificial Micro- and
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We develop a miniaturized chamber installed on a tandetron accelerator into which negative ions of small carbon clusters are transported.Negative clusters C-1-C-10 are obtained with beam currents of 1-104 nA at energies of l0-20keV.C-2 beams of 0.2μA are used to directly deposit carbon films on SiO2/Si substrates.Formation of ultrathin carbon films are demonstrated by Raman scattering,which reveals the evolution of the graphitic peak (1550cm-2) with deposition time.
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