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提出了一种两轴共体、带圆弧缺口支点的一体化机构的微位移驱动器。计算机仿真和实测结果表明:驱动器的工作范围在50×50μm以上,可控精度达0.03μm,驱动力大于0.74N,带宽超过400Hz。
A micro-displacement actuator with a two-axis common body and an integrated mechanism with a circular arc notch fulcrum is proposed. Computer simulation and measured results show that the working range of the driver is above 50 × 50μm, the controllable precision is up to 0.03μm, the driving force is greater than 0.74N and the bandwidth is over 400Hz.