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近年来,离子束混合的碰撞理论已基本建立起来,并发展了碰撞混合的计算机模拟。离子束混合过程中,化学效应可能会起着重要的作用。从一系列的实验结果中可以发现,碰撞混合理论与实验结果有较大的差别。对过渡金属/Si系统,发现一个Q—曲线规律,即在金属-Si的混合层中金属原子的数量(Q)随衬底温度倒数变化的曲线。由此,人们相信低温下碰撞混合机制起主导作用,而在较高温度(500℃以上)下,辐射对增强扩散
In recent years, ion beam hybrid collision theory has been basically established, and the development of a collision simulation of computer simulation. Chemical effects may play an important role in ion beam mixing. From a series of experimental results, it can be found that there is a big difference between collision-mixing theory and experimental results. For the transition metal / Si system, a Q-curve law was found, that is, the number of metal atoms (Q) in the mixed layer of metal-Si varies inversely with substrate temperature. As a result, it is believed that the collision-mixing mechanism plays a dominant role at low temperatures, whereas at higher temperatures (above 500 ° C) radiation enhances diffusion