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用常压烧结方法制备了掺钛氧化锌(TZO)陶瓷靶材,研究了TiO2掺杂量对TZO靶材的微观形貌、相对密度、抗弯强度和电阻率的影响。结果表明:添加适量TiO2利于TZO靶材的致密化,掺杂过量TiO2会使TZO陶瓷中析出Zn2TiO4;随TiO2掺杂量增大,靶材的相对密度和抗弯强度先增大后减小,电阻率则先减小后增大。当w(TiO2)为1.5%时,靶材相对密度获得最大值98.32%;当w(TiO2)为1.0%时,所制靶材抗弯强度最大(98.39 MPa),电阻率最小(2.586×10–3·cm),且其相对密度为98%。
Titanium - doped zinc oxide (TZO) ceramic targets were prepared by atmospheric pressure sintering. The effects of TiO2 doping amount on the morphology, relative density, flexural strength and electrical resistivity of TZO target were studied. The results showed that adding proper amount of TiO2 favored the densification of TZO target. Excess TiO2 doping could result in the precipitation of Zn2TiO4 in TZO ceramics. With the increase of TiO2 doping amount, the relative density and flexural strength of TZO first increased and then decreased, The resistivity first decreases and then increases. When the content of w (TiO2) is 1.5%, the relative density of target is 98.32%. When w (TiO2) is 1.0%, the maximum bending strength of the target is 98.39 MPa and the resistivity is the least (2.586 × 10 -3 · cm), and its relative density was 98%.