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该文针对现有压电马达应用于扫描探针显微镜时,难以在恶劣条件下获得高品质原子分辨率图像的问题,介绍了文章作者近年研制的新型小尺寸大推力压电马达,其中包括:壁虎马达、熊猫马达、金枪鱼马达和蜘蛛马达以及它们的一些压电片叠堆型设计,给出了它们的结构图、实物照片和工作原理。文章还讨论了如何利用它们制成高质量的扫描隧道显微镜(STM)和磁力显微镜(MFM),并特别展示了用这种STM在无隔音、无减震条件下,甚至在强振动干扰的恶劣条件下测得的高清晰原子分辨率图像。虽然这些高品质原子分辨率成像主要是由壁虎马达制成的STM给出的,但金枪鱼马达具有更强的输出推力,具有在更恶劣条件下的应用潜力。蜘蛛马达是一种惯性马达,但能够比传统惯性马达输出更强的推力,所以也具有在恶劣条件下应用的潜力。
In this paper, aiming at the problem that the existing piezoelectric motor is difficult to obtain high quality atomic resolution image when it is applied to a scanning probe microscope, a new small size large thrust piezoelectric motor developed by the author in recent years is introduced, including: Gecko motors, panda motors, tuna motors and spider motors, as well as some of their piezo stack-type design, given their structure, photos and working principle. The article also discussed how to use them to make high-quality scanning tunneling microscope (STM) and magnetic force microscope (MFM), and especially shows the use of this STM without noise, without damping conditions, even in the harsh interference of strong vibration High-resolution atomic resolution image measured under conditions. Although these high-quality atomic resolution imaging is mainly given by the STM made by gecko motors, the tuna motor has a stronger output thrust and has potential applications under even harsher conditions. Spider motor is a kind of inertia motor, but it can output stronger thrust than traditional inertial motor, so it has the potential to be applied under harsh conditions.