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考虑到离子交换和离子扩散工艺的特殊要求,设计并熔制了适合于离子交换工艺的硅酸盐玻璃材料SiO2-B2O3-Al2O3-R’O-R2O(R’=Ca,Mg;R=Na,K).采用Ag+/Na+熔盐离子交换和电场辅助离子扩散工艺在这种玻璃材料基片上获得了掩埋式条形光波导.光学显微镜和电子探针分析表明高折射率的Ag+扩散区位于玻璃基片表面以下约10μm处,形成光波导的芯部.光波导芯部尺寸约为8μm×8μm,与单模光纤芯径尺寸相当,保证了较低的光纤耦合损耗.对光波导的测量结果得出:在波长为1.5μm处条形光波导的传输损耗约为0.1dB/cm,与单模光纤的耦合损耗约为0.2～0.3dB.条形光波导的传输损耗与材料本身的损耗接近,表现出掩埋式光波导的低损耗特征.分析表明,经过进一步优化,这种光波导制备技术可用于低损耗光波导器件的制作.
Considering the special requirements of ion exchange and ion diffusion process, the silicate glass material SiO2-B2O3-Al2O3-R’O-R2O (R ’= Ca, Mg; R = Na , K). A buried strip optical waveguide was obtained on this glass substrate by using Ag + / Na + molten salt ion exchange and electric field assisted ion diffusion. Optical microscopy and electron probe analysis showed that the Ag + The core of the optical waveguide is formed at about 10 μm below the surface of the glass substrate The optical waveguide core has a size of about 8 μm × 8 μm and is comparable in size to a single mode fiber core to ensure a low fiber coupling loss. The results show that the transmission loss of a strip-shaped optical waveguide at a wavelength of 1.5 μm is about 0.1 dB / cm and the coupling loss with a single-mode optical fiber is about 0.2~0.3 dB. The transmission loss of the strip-shaped optical waveguide and the loss of the material itself Close to show the low loss characteristics of the buried optical waveguide.The analysis shows that this optical waveguide preparation technology can be used for the fabrication of low loss optical waveguide devices after further optimization.