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微型机电系统技术是一个新兴的技术领域。本文介绍了微电子机械系统 (MEMS)的特点和关键技术 ,讨论了MEMS的应用 ,并阐述了MEMS的发展趋势
MEMS technology is an emerging technology area. This paper introduces the characteristics and key technologies of Microelectromechanical System (MEMS), discusses the application of MEMS, and expounds the development trend of MEMS