Using metallo-organatic compound TPT as the source of Ti, H13 mould steels were coated with Ti(CN) films by plasma-assisted chemical vapor deposition (PCVD) and the properties of Ti(CN) films were studied. Under the appropriate temperature and pressure, Ti(CN) films on H13 mould steel surfaces had the highest micro-hardness of HV1760 at 500°C, and the films showed excellent anti-oxidation property below 500°C. The lifetime of Ti(CN)-coated augers and dies could be enhanced 7 and 4 times longer than those of untreated respectively. Using metallo-organatic compound TPT as the source of Ti, H13 can steels were coated with Ti (CN) films by plasma-assisted chemical vapor deposition (PCVD) and the properties of Ti pressure, Ti (CN) films on H13 mold steel surfaces had the highest micro-hardness of HV1760 at 500 ° C, and the films showed excellent anti-oxidation property below 500 ° C. The lifetime of Ti (CN) -coated augers and dies could be enhanced 7 and 4 times longer than those of untreated respectively.