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对镀膜双层硅微机械谐振器的光热激励进行了实验研究 ,在大气环境下对硅微谐振器进行了光激电拾实验测试和光激光拾实验测试。成功观测到了硅微谐振器的一阶、二阶和三阶谐振状态。在光激光拾实验测试中提出了一种新颖的“单光源实验测试方法” ,即 :使用同一光源同时实现硅微谐振器的光热激振和微弱谐振信号的提取 ,这与传统的“双光源实验方法”相比 ,简化了实验系统 ,有利于实用化开发。
The photothermal excitation of the coated double-layer silicon micro-mechanical resonator was experimentally studied. The photo-induced laser pickup experiment and the optical laser pickup experiment were carried out in the atmospheric environment. The first, second and third order resonant states of the silicon microresonator were successfully observed. In the experiment of optical laser pickup experiment, a novel “single light source experiment test method” is proposed, that is, the same light source is used to simultaneously realize the optical thermal excitation and the weak resonance signal extraction of the silicon microresonator, which is similar to the conventional “ Light source experimental method ”compared to simplify the experimental system, is conducive to practical development.