论文部分内容阅读
表面是晶态固体原子在三维空间周期排列的终止处,它不同于体内环境。具有独特的局域化电子态和振动态。材料的许多性质与表面和界面状态有着密切的联系。从原子或分子级水平来研究表面的现代表面分析技术,是由能取得纳米(nm)级表面信息的能力来表征的。文中对四种实用表面分析技术,即AES、XPS、ISS和SIMS的进展作了综合性述评。综合表现在灵敏度、分辨率、数据采集和处理以及稳定性等方面的大幅度提高。但实验室间的数据比较表明,标准方法,校正步骤和数据库的建立仍是当务之急。
The surface is crystalline solid atoms in the three-dimensional space at the end of the arrangement, it is different from the body environment. Has a unique localization of electronic and vibrational state. Many properties of materials are closely linked with the surface and interface states. Modern surface analysis techniques that study surfaces at the atomic or molecular level are characterized by their ability to acquire nanometer (nm) surface information. The article reviews the progress of four practical surface analysis techniques, namely AES, XPS, ISS and SIMS. Comprehensive performance in the sensitivity, resolution, data acquisition and processing, and stability and so on a substantial increase. However, comparison of laboratory data shows that the standard methods, calibration procedures and database establishment are still top priorities.