论文部分内容阅读
介绍了一种新型的用于工业生产的PCVD法工模具表面强化设备。设备的有效容积为φ480mm×800mm,装载量可以达到300kg以上。其中自行设计的内热式加热系统,采用了高压脉冲等离子电源和多路蒸发系统。用该设备可以制备TiN系薄膜和TiSiN、TiAlN等三元系薄膜,批量处理各类金属切削刀具和模具,并且显著提高工模具的使用寿命。还介绍了有关的工艺技术和设备技术。
A new type of PCVD mold surface hardening equipment for industrial production is introduced. The effective volume of equipment is φ480mm × 800mm, the loading capacity can reach above 300kg. One self-designed heating system, using a high-pressure pulsed plasma power and multi-channel evaporation system. TiN film and TiNN, TiAlN and other ternary films can be prepared by using this equipment, batch processing of all kinds of metal cutting tools and molds, and significantly improve the service life of tooling. Also introduced the technology and equipment technology.