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利用同步辐射光电子能谱全电子产额模式 (TEY)对石墨、金刚石薄膜和类金刚石薄膜 (DLC)的 C1s X射线吸收谱进行了研究。在高真空里表面净化处理后,在类金刚石薄膜的 C1s 吸收谱中分别观察到对应于金刚石 sp3杂化结构成分和石墨 sp2杂化结构成分的特征峰,说明了类金刚石薄膜是由碳 sp2、sp3两种杂化结构无序混合形成的非晶碳结构;然后,测量了一系列类金刚石薄膜样品的 C1s X 射线光电子能谱 (XPS),得到了每组样品的 sp2/sp3成分比。
The C1s X-ray absorption spectra of graphite, diamond films and diamond-like carbon films (DLCs) were studied using synchrotron radiation photoelectron spectroscopy (TEA). In the high vacuum in the surface after the purification process, in the diamond-like carbon in the C1s absorption spectra were observed corresponding to diamond sp3 hybrid structure components and graphite sp2 hybrid structure of the characteristic peaks, indicating that the diamond-like carbon film is composed of carbon sp2, sp3 hybrid structure formed by the disorderly amorphous carbon structure; and then measured a series of diamond-like carbon films by C1s X-ray photoelectron spectroscopy (XPS), obtained for each sample sp2 / sp3 composition ratio.