前言在微小位移及微小振动幅值测量中,利用激光干涉法的方法具有高灵敏度,目前被广泛使用。但此法结构复杂,在调整和测量中需要熟练的技术。而电容式传感器构造简单,使用方便,并可获得较高灵敏度。但可供使用的电路较少。通常,随着静电容的减少,由电容器引线端与接地间的分布电容所产生的误差增大。此时若考虑使用三引线电容器结构的被测电容以 Foreword In the measurement of small displacement and small vibration amplitude, the method using laser interferometry has high sensitivity and is widely used at present. However, this method is complicated in structure and requires skillful skill in adjustment and measurement. The capacitive sensor is simple to construct, easy to use, and can obtain higher sensitivity. But fewer circuits are available. Normally, as the capacitance decreases, the error caused by the distributed capacitance between the capacitor leads and ground increases. At this point if you consider the use of three-lead capacitor structure to be measured capacitance