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综述了几种用于监控薄膜外延生长的光学原位实时监测方法的进展．其中光反射差法／光反射各向异性谱（ＲＤＳ／ＲＡＳ）和ｐ偏振反射谱（ＰＲＳ）、表面光吸收（ＳＰＡ）、椭偏仪（ＳＥ）等，在外延过程中已观测到了薄膜层状外延周期振荡
The progress of several methods of optical in situ monitoring for the monitoring of epitaxial growth of thin films is reviewed. Among them, RDS / RAS and PRS, SPA and ellipsometer (SE) were used in the study. The lamellae of thin films were observed during the epitaxial process Epitaxial period oscillation