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最新大焦深超高分辨率的成象技术ＮＩＫＯＮ公司该公司在革新的照明系统基础上确立了一项新的光刻技术即ＳＨＲＩＮＣ（照明控制的超高分辨率）。针对（一次版）间距产生的１级衍射光角度，进行照明系统的最佳设置，使ＳＨＲＩＮＣ提高了分辨率和焦深（ＤＯＦ）。通过计算...
New Focus Focuses on Ultra-High Resolution Imaging NIKON Corporation The company established a new lithography technology called SHRINC (Illumination Controlled Ultra-High Resolution) based on an innovative lighting system. For the first order diffracted light angle produced by the (one-shot) pitch, the optimal setup of the illumination system allows SHRINC to increase resolution and depth of focus (DOF). via caculation...