论文部分内容阅读
由于存在振动和导向误差,干涉仪移相器在移相过程中产生随机的平移误差和倾斜误差,会给测量结果带来影响。因此高精度测量中对环境的稳定性和移相器的性能要求很苛刻。为了降低此种要求,针对随机和倾斜移相下干涉图背景光强和调制度的不均匀会影响移相平面计算的问题,对采集得到的干涉图做归一化处理,并利用迭代最小二乘法对归一化的干涉图做相位求解。迭代过程中,将干涉图分块来求解移相值,并对各移相值做平面拟合得到移相平面。仿真结果表明,该方法消除了背景光强和调制度的不均匀对倾斜系数计算的耦合作用,能够有效补偿倾斜移相误差对面形相位的影响,与其他方法相比,具有收敛速度快、求解精度高的特点。实验结果进一步验证了该方法的有效性。
Due to the vibration and steering errors, the interferometer phase shifter produces random translation errors and tilt errors during the phase shift, which will affect the measurement results. Therefore, high-precision measurement of environmental stability and phase shifter performance requirements are very demanding. In order to reduce this kind of requirement, aiming at the nonuniformity of the background light intensity and the modulation degree of the interferogram under random and tilt phase shift, the problem of the phase shifting plane calculation will be affected. The interferogram acquired will be normalized and the minimum Multiplication Phase Solving Normalized Interferogram. In the iterative process, the interferogram is divided into blocks to find the phase-shift value, and the phase-shifted values are plane-fitted to obtain the phase-shifting plane. The simulation results show that the proposed method can eliminate the coupling effect of nonuniformity of background light intensity and modulation degree on the calculation of tilt coefficient, and can effectively compensate for the influence of tilt phase shift error on the shape phase. Compared with other methods, this method has the advantages of fast convergence, High-precision features. Experimental results further verify the effectiveness of the method.