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采用射频(RF)磁控溅射法在玻璃衬底上制备了SnO_2-Al_2O_3(SAO)双金属元素薄膜。通过扫描电子显微镜SEM,X射线衍射仪XRD、四探针测量,UV-IR及光致发光(PL)谱研究了衬底温度对薄膜表面形貌、晶体微结构、电学及光学特性的影响。当衬底温度升高时,SAO薄膜的晶粒尺寸增大。SEM及XRD结果显示的均质表面结构及大晶粒尺寸表明薄膜具有良好的表面形貌和结晶度。在400~800 nm的可见光范围,薄膜的透射率可达80%~90%,计算得到薄膜的带隙4.11~4.14 eV,表面电阻7.0×10~4~9.4×10~4W/。通过合理选择溅射温度,薄膜的带隙可得到增宽,表面电阻可被降低。测量还发现,所制备SAO薄膜的PL谱在UV及红光带发光,这种多晶SAO薄膜可用于透明导电氧化物(TCO)薄膜,太阳能电池窗、传感器及光发射器。
SnO_2-Al_2O_3 (SAO) bimetallic thin films were prepared on glass substrates by radio frequency (RF) magnetron sputtering. The effects of substrate temperature on the surface morphology, crystal structure, electrical and optical properties of the films were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD), four probe measurement, UV-IR and photoluminescence (PL) spectra. As the substrate temperature increases, the grain size of the SAO thin film increases. SEM and XRD results show that the homogeneous surface structure and large grain size indicate that the film has good surface morphology and crystallinity. In the visible light range of 400-800 nm, the transmittance of the film can reach 80% -90%. The band gap of the film is 4.11-4.14 eV and the surface resistance is 7.0x10-4-4.9x10-4W /. By reasonably selecting the sputtering temperature, the bandgap of the film can be broadened and the surface resistance can be reduced. The PL spectra of the prepared SAO films were also found to be luminescent in the UV and red bands. This polycrystalline SAO film can be used for transparent conductive oxide (TCO) films, solar cell windows, sensors and light emitters.