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Argonne国家实验室(位于伊利诺州的Argonne)的研究人员成功地开发了一种被命名为超纳米结晶膜的金刚石薄膜。此种薄膜技术预计将大大加速MEMS(微机电系统)技术的发展。此种薄膜将金刚石本质的优良机械性能,摩擦性能,和热性能(优异的硬度,耐磨损性,和极低的摩擦系数等)引入了迅猛发展的MEMS领域。 迄今为止,许多MEMS装置由于采用的硅材料,在耐久性和耐摩擦方面不够理想,因而不能胜任;现在由于超纳米结晶膜的出现,有
Researchers at Argonne National Laboratory in Argonne, Illinois, have successfully developed a diamond film that is named Super Nanocrystalline Membrane. This thin-film technology is expected to greatly accelerate the development of MEMS (Micro Electro Mechanical Systems) technology. This kind of film introduces the excellent mechanical properties, frictional properties, and thermal properties (excellent hardness, wear resistance, and extremely low coefficient of friction) of the diamond essence into the rapidly evolving field of MEMS. To date, many MEMS devices have not been satisfactory in terms of durability and rub resistance due to the use of silicon materials; thus, due to the appearance of super nanocrystalline films, there are