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用矢量衍射方法分析了线偏振光入射到带有三环位相型光瞳滤波器的高数值孔径物镜时,焦点的轴向和横向光强分布.数值模拟结果表明,高数值孔径物镜聚焦时需同时考虑光强的轴向和横向分布.通过加入三环位相光瞳滤波器,在实现横向超分辨的同时实现了光学系统轴向焦深扩展和轴向光强分布平坦化,并且位相调制深度变化时,会出现轴向焦移现象.对三环位相光瞳滤波器结构进行了优化,得出了优化结果.
The axial and transverse light intensity distributions of the focal point when linearly polarized light is incident on a high numerical aperture objective with a three-ring phase-type pupil filter are analyzed by means of vectorial diffraction. Numerical simulations show that the high numerical aperture objective needs to be focused Taking into account the axial and lateral distribution of light intensity.Through the addition of the tricyclic phase pupil filter, the axial depth of focus and axial light intensity distribution of the optical system are realized while realizing the horizontal super-resolution, and the phase modulation depth The axial co-axial shift will occur, and the structure of the three-ring phase pupil filter is optimized, and the optimization result is obtained.