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深紫外(DUV)全固态激光(DPL)源,指输出波长短于200 nm的固体激光,它易于实用化与精密化,是一种新型激光源。综述了它的历史、现状、发展及应用。
DUV (all-solid-state laser) source (DPL) is a new type of laser source that can output solid-state laser with wavelength shorter than 200 nm. It is easy to use and precise. It summarizes its history, current situation, development and application.