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研究了单端加载铁电叉指电容的微带半波长谐振器的压控特性.铁电材料为LaAlO3衬底上脉冲激光淀积的SrTiO3,叉指电容电极为金.测量了谐振器77K下的压控谐振性能.谐振频率在6GHz左右,70V偏压下的压控频率范围大于180MHz.在10~40V内,谐振频率与偏置电压之间呈良好的线性关系,谐振器的有载Q值为60~90.
The voltage-controlled characteristics of a microstrip half-wavelength resonator with single-ended ferroelectric finger capacitors are investigated. The ferroelectric material is SrTiO3 deposited by pulsed laser deposition on LaAlO3 substrate and the interdigital capacitor electrode is gold. The resonant frequency is about 6GHz, and the voltage control frequency range under 70V bias is greater than 180MHz. Within 10 ~ 40V, there is a good linear relationship between the resonant frequency and the bias voltage. The loaded Q The value is 60 ~ 90.