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嵌陷叉指换能器沟槽谐振器,不但具有SAW沟槽谐振器的Q值高,老化性能好的优点,而且能够克服处于谐振腔中的叉指电极对SAW的反射干扰畸变,可以一次光刻成型、重复性好,制作方便,叉指电极不易被磨损,是制作高基频谐振器频率源和窄带滤波器的较理想结构. 本文阐述此种沟槽谐振器的研制.目前研制的器件中心频率为102MHz,其中最好的获得了在空气中的无载Q=24000,带外抑制28dB,插入损失6dB的结果.此外,我们还对沟槽刻蚀深度和叉指换能器嵌陷情况对器件性能的影响,进行了实验研究.
The embedded slotted resonator trench resonator not only has the advantages of high Q value and good aging property of the SAW trench resonator, but also can overcome the reflection interference distortion of the interdigitated electrode in the resonant cavity against SAW, Photolithography, repeatability, easy to manufacture, the interdigital electrode is not easy to wear, is the ideal structure for the production of high-frequency resonator frequency source and narrowband filter.This paper describes the development of such trench resonator.Currently developed The center frequency of the device is 102MHz, the best one is the result of no-load Q = 24000 in air, 28dB out-of-band rejection and 6dB insertion loss.In addition, we also analyze the trench etch depth and interdigital transducer embedded The effect of the trapped condition on the performance of the device was studied experimentally.