一、前言介质薄膜广泛地应用在许多方面,其中较重要的如光学涂层、微电子学(即金属—氧化物—半导体工艺)、磁光学(即气泡域装置)和防护涂层。在上述大多数应用领域的准备阶段和最后性能试验时必须精密测定薄膜厚度和折射率。在大规模的工业生产中,测定速度和操作简便,以及全部自动化就 I. INTRODUCTION Dielectric films are widely used in many aspects, of which the more important are optical coatings, microelectronics (ie, metal-oxide-semiconductor processes), magneto-optics (ie, bubble domain devices), and protective coatings. Film thickness and refractive index must be precisely measured during the preparation and final performance tests of most of the above applications. In large-scale industrial production, measurement speed and ease of operation, as well as full automation