一、用途及使用要求 SK-1A型膜厚控制仪,是真空镀膜设备在蒸镀过程中对薄膜厚度进行监控的仪器,对于蒸镀金属、半导体或介质薄膜,只要知道被蒸材料的密度都可以进行监控,电阻蒸发或电子束蒸发设备均可适用。目前主要用在电学镀膜范围。 本仪器是利用晶体探头振荡频率随淀积在晶 First, the use and use requirements SK-1A-type thickness control device is the vacuum deposition equipment in the deposition process to monitor the thickness of the film equipment, for the evaporation of metal, semiconductor or dielectric film, as long as the density of the material being steamed know Can be monitored, resistance evaporation or electron beam evaporation equipment can be applied. Currently mainly used in the range of electrical coating. The instrument is the use of crystal oscillator frequency oscillation with the deposition in the crystal