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在液相外延过程中,保持生长温度下变,熔料组分不变。改变基片旋转速率,在钇镓石榴石(GGG)基片上连续生长了两层薄膜。其中一层Bi的含量比另一层稍高,导致两层膜折射率之差△n<10-2,铁磁共振波谱发现每层膜各有一主共振峰,且共振线宽较小,磁光特性测量表明,Bi3-可同时增强法拉第旋转用和光吸收,Al3-则同时减弱法拉第旋转角和光吸收。利用离子束刻蚀的方法,在双层(BiAl)YIG磁光薄膜上制作了宽度为30μm的脊形波导。
During the liquid phase epitaxy, the growth temperature is kept down while the melt composition is unchanged. By changing the substrate rotation rate, two layers of thin films were continuously grown on the YGG substrate. One layer of Bi content slightly higher than the other, resulting in the difference between the refractive index of the two layers △ n <10-2, ferromagnetic resonance spectrum found that each layer has a main resonance peak, and the resonant linewidth is small, magnetic Measurement of optical properties shows that Bi3- can enhance both Faraday rotation and light absorption, and Al3- can simultaneously weaken the Faraday rotation angle and light absorption. Using ion beam etching, a ridge waveguide with a width of 30μm was fabricated on a bilayer (BiAl) YIG magneto-optical thin film.