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1 引言 自适应反射镜的研制主要是为了补偿地基望远镜的大气畸变 ,近来它们在激光系统中也找到应用。保证反射镜成功用于自适应光学系统的主要要求是反射镜的变形和频率范围、少量控制通道、表面的高温稳定性、生产和应用简便 ,以及廉价反射镜。双层压电晶片元件的自适应反
1 Introduction The development of adaptive mirrors is mainly to compensate for the atmospheric distortion of ground-based telescopes. Recently they have also been found in laser systems. The main requirements that ensure the successful use of mirrors for adaptive optics are the mirror deformation and the frequency range, the small number of control channels, the high temperature stability of the surface, the ease of production and application, and the cheap mirrors. Self-adaptive inversion of bimorph piezoelectric elements