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本文用平面靶射频磁控溅射在具有双轴织构的Ｎｉ片上外延生长ＣｅＯ２和ＹＳＺ薄膜作为阻挡层，Ｘ射线衍射扫描分析表明ＣｅＯ２和ＹＳＺ薄膜具有强的ｃ轴织构和较好的平面内双轴织构．用中空柱状靶直流磁控溅射在阻挡层上制备ＹＢＣＯ超导薄膜．在２ｃｍ波带测量了ＹＢＣＯ的表面电阻和谐振腔有载ＱＬ值
In this paper, CeO2 and YSZ thin films were epitaxially grown on biaxially-textured Ni wafers as barrier layers by planar target radio frequency magnetron sputtering. The X-ray diffraction analysis showed that the CeO2 and YSZ films have a strong c-axis texture and are good In-plane biaxial texture. YBCO superconducting thin films were prepared on the barrier layer by DC magnetron sputtering. The surface resistance of the YBCO and the loaded QL of the resonator were measured in a 2 cm band