论文部分内容阅读
采用磁控溅射方法在玻璃衬底上制备了不同厚度的FePd合金薄膜。利用X射线衍射(XRD),能谱(EDS)和物理性能测试研究了薄膜厚度对结构和磁性能的影响。结果表明,在FePd合金薄膜中有序化过程发生在更厚的薄膜中。随着薄膜厚度从d=22.5 nm增加到d=67.5 nm,面内矫顽力刚开始急剧增大,然后随着薄膜厚度的进一步增加矫顽力会减小。在d=67.5 nm时面内矫顽力最大约为3.2×79.6kA/m。
Different thicknesses of FePd alloy films were prepared on glass substrates by magnetron sputtering. The effect of film thickness on the structure and magnetic properties was investigated by X-ray diffraction (XRD), energy dispersive spectroscopy (EDS) and physical property tests. The results show that the ordering process in FePd alloy films takes place in thicker films. As the thickness of the film increases from d = 22.5 nm to d = 67.5 nm, the in-plane coercivity begins to increase sharply, and then decreases with the further increase of the film thickness. The maximum in-plane coercivity at d = 67.5 nm is about 3.2 × 79.6kA / m.