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提出了一种使用三坐标测量机(CMM)测量底面为圆形、矩形、跑道形离轴非球面面形误差的方法。针对离轴非球面的外形特征设计工件坐标系,规划工件坐标系定位点;利用CMM对离轴非球面进行点触发式自动测量,得到被测面点云坐标数据;建立离轴非球面数据处理模型,得出了面形误差。模拟分析表明,该测试方法和误差处理模型是正确的,并用该检测技术完成了离轴非球面粗抛光阶段的加工。
A method for measuring the shape error of the off-axis aspheric surface with circular, rectangular and racetrack shape using CMM is proposed. Designing the workpiece coordinate system for the shape characteristics of off-axis aspheric surface and planning the positioning point of the workpiece coordinate system; Using point-trigger automatic measurement of off-axis aspheric surface with CMM to get the coordinate data of cloud point of the measured surface; Establishing the off-axis aspheric data processing Model, obtained the shape error. Simulation results show that the test method and the error processing model are correct, and the processing of the off-axis aspheric rough polishing stage is completed by using the detection technique.